SIC Vacuum Sintering Furnace
This SIC vacuum furnace is applied for Silicon Carbide sintering, and user can charging shielding gas into furnace for sintering process, this furnace has gas cooling circulation function, high work efficiency, the control system was controlled by PLC, user can choice auto / manual undisturbed switching to operate it, this furnace has abnormal condition alarming function too, high automation of control ,easy to operate.
Silicon carbide sintering furnace is mainly used for recrystallization silicon carbide, silicon nitride bonded silicon carbide and reactive sintering silicon carbide.
Vacuum leakage rate
3Pa/h(Average in cold,empty,dry chamber within 24 hours)
Slide-valve Pump,Roots Pump (Imported Pump or domestic
Pump according to customer's requirement)
Temp.& Atmosphere Uniformity
± 0.4KAM,Magnetic saturation: ≤ ±0.3,Temp.variation:≤ ±8ºC
Temp. measurement Mode
3-zone or 4-zone Temp. Control
Vacuum heating,vacuum dewaxing,H2 dewaxing,heating flowing gas,
heating with gas mixture(CO2,CH4,H2),Rapid cooling