Slide Rail-type Tubular Furnace with Max. Temperature 1100℃
The slide rail-type tubular furnace is of an integral structure and meets the special process requirements of quickly heating and quickly cooling at the temperature lower than 1100℃, and the quick cooling purpose is realized by moving the furnace body. Meanwhile, the temperature can be preset and then the furnace is moved to a sample, so as to achieve the quick heating effect. The tubular furnace is suitable for the RTP process and CVD grapheme process which are widely applied.

➢Characteristics:
◆Working temperature: RT～1000℃
◆Intelligent preprogrammed temperature controller: Can control the temperature precisely, edit, save and transfer multiple programs.
◆The ceramic fiber FEC heating module is adopted to realize the resistance wire-embedded surrounding heating effect.
◆Furnace mantle structure: Double-layer furnace mantle air-cooled structure.
◆Double-layer stainless sealing flange: U.S. standard needle valves are adopted as the air inlet and outlet valves.
◆Flange support structure with both ends adjustable: Can prolong the service life of the quartz tube.
◆Over-temperature protective function: The power is off automatically when the temperature exceeds the permissible set values.
◆Safety protection: The power is off automatically when the furnace body leaks current.
 
➢Extra Options 
◆Furnace measuring system (oxygen content testing system, temperature testing system)
◆Vacuum system (rotary vane mechanical pump, diffusion pump unit, molecular pump unit)
◆Atmosphere system (floater flowmeter, mass flowmeter)
◆Monitoring system (temperature recorder, touch screen remote monitoring)
! Note: The optional accessories shall be equipped with the expansion cabinet.