Hydrogen-Nitrogen Mixed Gas Reduction CVD Furnace
1700 ° C hydrogen reduction CVD furnace can be used for vacuumizing and filling atmosphere, so it is also called vacuum tube furnace and atmosphere tube furnace.
The tube is made of seamless high-purity alumina with a maximum operating temperature of 1650 ° C. In order to meet the test requirements of introducing hydrogen, the tube furnace is equipped with a manual ignition device at the right end of the furnace tube to ensure the safety of the test; the left side of the furnace tube is equipped with a vacuum gauge and a barometer to control the vacuum and atmosphere inside the furnace tube. The interlock of the solenoid valve with the pressure sensor and the combustible gas detection device ensures the further safety of the test.
The system also includes a two-channel rotameter with stainless steel needle valve and an air pressure gauge to accurately mix the gas meeting the test requirements. Usually, this set of instrument is used with two-stage rotary vane vacuum pump to realize the general low vacuum test environment. If you need a higher vacuum, you can contact our technicians to choose a more powerful molecular pump.
hydrogen reduction CVD furnace Application scope:
This equipment is widely used in material or chemical laboratory to sinter various new material samples under the condition of hydrogen or hydrogen nitrogen mixture.
Technical parameters of hydrogen reducing CVD furnace
Vacuum tube furnace
High purity alumina
Furnace chamber length
Heating zone length
Constant temperature zone
Temperature control accuracy
Temperature control mode
30 or 50 segment program temperature control
304 stainless steel vacuum flange
1/4" ferrule connector, KF16/25/40 joint
Gas supply system
Gas float flowmeter
A channel: 0~100ml H2 gas
Remarks: If you need other ranges or gas types, you need to specify when ordering.
B channel: 16~160ml N2 gas
Pipe pressure resistance
Working pressure difference
304 stainless steel
304 stainless steel needle valve
1/4" ferrule connector for gas inlet and outlet
Rotary vane pump