Chemical vapor deposition experiment tube furnace
Product description
Model | CVD-12TP |
Limiting temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | Suggestion 0~20℃/min |
Temperature zone | SINGLE,TWO, THREE FIVE AS your need |
Temperature accuracy | ±1℃ |
Chamber size | Φ60×1200(mm) |
Heating element | Imported alloy electric resistance wire |
Thermal couple | K Type (<1200.C) |
Temperature control | PID automatic control ,one set point control |
Heating curves | 30 segments programmable |
Chamber material | Imported high purity fiber |
Heating zone | 440mm |
Thermostatic zone | 200mm |
Tube material | high purity quartz glass |
Sealing type | stainless steel vacuum flange |
Tightness | 4.03*10-3Pa |
Main power | 2.5kw |
gas way | 3 gas can be connected |
A way range | 10-100ml/min |
B way range | 16-160ml/min |
C way range | 25-250ml/min |
Gasline pressure | -0.1-0.15Mpa |
System vacuum | 5-10Pa |
ump connection | KF16 stainless steel Bellows, KF16 clamps, KF16 flapper valve |
Vacuum meter | mechanical vacuum gauges, or electronic vacuum gauges |
Working voltage | 220V 50-60Hz |
Standard accessories | Quartz tube, vacuum flange, tube blockage, O-ring, protective gloves, crucible furnace hook, PTFE tube, stainless steel fittings, stainless steel bellows, adapter, 5mm hex wrench |
1. Upper substructure, easy to take and place pipes
2. High purity quartz tube, high temperature resistance 1200 ℃
3.30 programmable and PID automatic control.
4. You can select metal button or touch panel operation interface.
5. Imported energy-saving room materials.
6. The furnace adopts double lining structure, with gap isolation in the middle. Even if the furnace temperature is up to 1000. C, the furnace body surface can still contact safely.
