SIC Vacuum Sintering Furnace
Introduction :
This SIC vacuum furnace is applied for Silicon Carbide sintering, and user can charging shielding gas into furnace for sintering process, this furnace has gas cooling circulation function, high work efficiency, the control system was controlled by PLC, user can choice auto / manual undisturbed switching to operate it, this furnace has abnormal condition alarming function too, high automation of control ,easy to operate.
Application :
Silicon carbide sintering furnace is mainly used for recrystallization silicon carbide, silicon nitride bonded silicon carbide and reactive sintering silicon carbide.
Model parameter:
Cooling Period | ≤5h/ ≤6h |
Vacuum leakage rate | 3Pa/h(Average in cold,empty,dry chamber within 24 hours) |
Vacuum pump | Slide-valve Pump,Roots Pump (Imported Pump or domestic Pump according to customer's requirement) |
Wax-collection Rate | ≥98% |
Temp.& Atmosphere Uniformity | ± 0.4KAM,Magnetic saturation: ≤ ±0.3,Temp.variation:≤ ±8ºC |
Temp. measurement Mode | Wre5-26 thermocouple |
Temp.Control Mode | 3-zone or 4-zone Temp. Control |
Functions | Vacuum heating,vacuum dewaxing,H2 dewaxing,heating flowing gas, heating with gas mixture(CO2,CH4,H2),Rapid cooling |
Heating power | 180KVA/280KVA |
